De Gendt, StefanStefanDe GendtChen, JerryJerryChenCarter, RichardRichardCarterCartier, EduardEduardCartierCaymax, MattyMattyCaymaxClaes, MartineMartineClaesConard, ThierryThierryConardDelabie, AnneliesAnneliesDelabieDeweerd, WimWimDeweerdKaushik, VidyaVidyaKaushikKerber, AndreasAndreasKerberKubicek, StefanStefanKubicekMaes, JanJanMaesNiwa, M.M.NiwaPantisano, LuigiLuigiPantisanoPuurunen, RiikkaRiikkaPuurunenRagnarsson, Lars-AkeLars-AkeRagnarssonSchram, TomTomSchramShimamoto, YasuhiroYasuhiroShimamotoTsai, WilmanWilmanTsaiRöhr, ErikaErikaRöhrVan Elshocht, SvenSvenVan ElshochtWitters, ThomasThomasWittersYoung, EdwardEdwardYoungZhao, ChaoChaoZhaoHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7405Implementation of high-k gate dielectrics - a status updateProceedings paper