Fabrication and performance of Au-free AlGaN/GaN-on-Si power devices

Van Hove, MarleenMarleenVan HoveKang, XuanwuXuanwuKangStoffels, SteveSteveStoffelsWellekens, DirkDirkWellekensRonchi, NicoloNicoloRonchiVenegas, RafaelRafaelVenegasGeens, KarenKarenGeensDecoutere, StefaanStefaanDecoutere2021-10-212021-10-2120130018-9383https://imec-publications.be/handle/20.500.12860/23258Fabrication and performance of Au-free AlGaN/GaN-on-Si power devicesJournal article