High-mobility Si1-xGex-channel PFETs: layout dependence and enhanced scalability, demonstrating 90% performance boost at narrow widths

Eneman, GeertGeertEnemanYamaguchi, ShinpeiShinpeiYamaguchiOrtolland, ClaudeClaudeOrtollandTakeoka, ShinjiShinjiTakeokaWitters, LiesbethLiesbethWittersChiarella, ThomasThomasChiarellaFavia, PaolaPaolaFaviaHikavyy, AndriyAndriyHikavyyMitard, JeromeJeromeMitardKobayashi, M.M.KobayashiKrom, RaymondRaymondKromBender, HugoHugoBenderTseng, JoshuaJoshuaTsengWang, Wei-EWei-EWangVandervorst, WilfriedWilfriedVandervorstLoo, RogerRogerLooAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17076High-mobility Si1-xGex-channel PFETs: layout dependence and enhanced scalability, demonstrating 90% performance boost at narrow widthsProceedings paper