Process and properties of porous low-k dielectrics

Travaly, YoussefYoussefTravalyVan Hove, MarleenMarleenVan HoveBeyer, GeraldGeraldBeyerMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8226Process and properties of porous low-k dielectricsOral presentation