Ferchichi, AbdelkarimAbdelkarimFerchichiTravaly, YoussefYoussefTravalyCarbonell, LaureLaureCarbonellVanstreels, KrisKrisVanstreelsBeyer, GeraldGeraldBeyerBaklanov, MikhaïlMikhaïlBaklanovAsakuma, S.S.AsakumaNakajima, M.M.Nakajima2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15301Evaluation of an advanced organic ultra-low-k materialProceedings paper