High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit

Roelkens, GuntherGuntherRoelkensVermeulen, D.D.VermeulenVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaetsBrison, S.S.BrisonLyan, P.P.LyanGautier, P.P.GautierFedeli, J.J.Fedeli2021-10-172021-10-172008-030003-6951https://imec-publications.be/handle/20.500.12860/14378High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuitJournal article