Detavernier, C.C.DetavernierVan Meirhaeghe, R.L.R.L.Van MeirhaegheVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8838Influence of processing conditions on CoSi2 formation in the presence of a Ti capping layerJournal article