Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation

Kolbe, M.M.KolbeBeckhoff, B.B.BeckhoffKrumrey, M.M.KrumreyReading, M.M.ReadingVan den berg, J.J.Van den bergConard, ThierryThierryConardDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15619Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiationProceedings paper