Mobility in high-k dielectric based field effect transistors

Ragnarsson, Lars-AkeLars-AkeRagnarssonTsai, WilmanWilmanTsaiKerber, AndreasAndreasKerberChen, P.J.P.J.ChenCartier, E.E.CartierPantisano, LuigiLuigiPantisanoDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8058Mobility in high-k dielectric based field effect transistorsProceedings paper