Kraus, P.A.P.A.KrausChua, T.C.T.C.ChuaAhmed, K.Z.K.Z.AhmedCampbell, J.J.CampbellNouri, F.F.NouriCruise, J.J.CruiseRothschild, AudeAudeRothschildVeloso, AnabelaAnabelaVelosoMertens, SofieSofieMertensSchaekers, MarcMarcSchaekersCubaynes, F.N.F.N.CubaynesDate, LucienLucienDateSchreutelkamp, RobRobSchreutelkampBauer, T.M.T.M.Bauer2021-10-152021-10-1520041355-8633https://imec-publications.be/handle/20.500.12860/9149Further optimization of plasma nitridation of ultra-thin oxides for 65-nm node MOSFETSJournal article