Schulze, AndreasAndreasSchulzeLoo, RogerRogerLooMeersschaut, JohanJohanMeersschautvan Dorp, DennisDennisvan DorpGachet, DavidDavidGachetBerney, JeanJeanBerneyVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25879Advanced metrology for beyond silicon semiconductor device structuresProceedings paperhttps://www.nist.gov/sites/default/files/documents/pml/div683/conference/FCMN_CD.pdf