Briggs, BasoeneBasoeneBriggsWilson, ChrisChrisWilsonDevriendt, KatiaKatiaDevriendtvan der Veen, MarleenMarleenvan der VeenDecoster, StefanStefanDecosterPaolillo, SaraSaraPaolilloVersluijs, JankoJankoVersluijsKesters, ElsElsKestersSebaai, FaridFaridSebaaiJourdan, NicolasNicolasJourdanEl-Mekki, ZaidZaidEl-MekkiHeylen, NancyNancyHeylenVerdonck, PatrickPatrickVerdonckWan, DannyDannyWanVarela Pedreira, OlallaOlallaVarela PedreiraCroes, KristofKristofCroesDutta, ShibeshShibeshDuttaRyckaert, JulienJulienRyckaertMallik, ArindamArindamMallikLariviere, StephaneStephaneLariviereBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27936N5 technology node dual-damascene interconnects enabled using multi patterningProceedings paperhttp://ieeexplore.ieee.org/document/7968983/