High hole mobility SGOI substrates obtained by the germanium condensation technique

Souriau, LaurentLaurentSouriauNguyen, TuanTuanNguyenVandervorst, WilfriedWilfriedVandervorstLoo, RogerRogerLooTerzieva, ValentinaValentinaTerzievaCaymax, MattyMattyCaymaxMeuris, MarcMarcMeuris2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14504High hole mobility SGOI substrates obtained by the germanium condensation techniqueMeeting abstract