Mac Geary, M. J.M. J.Mac GearyBoeglin, H. J.H. J.BoeglinLubbers, A.A.LubbersMertens, PaulPaulMertensVermeire, BertBertVermeire2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/240Chemicals for the Chlorination of Gate OxidesProceedings paper