Yamana, MitsuharuMitsuharuYamanaLamantia, MatthewMatthewLamantiaPhilipsen, VickyVickyPhilipsenWada, ShingoShingoWadaNagatomo, TatsuyaTatsuyaNagatomoTonooka, YojiYojiTonooka2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16569Comparison of lithographic performance between MoSi binary mask and MoSi attenuated PSMProceedings paper