Gilbert, MatthieuMatthieuGilbertVandervorst, WilfriedWilfriedVandervorstKoelling, SebastianSebastianKoellingKambham, Ajay KumarAjay KumarKambham2021-10-192021-10-1920110304-3991https://imec-publications.be/handle/20.500.12860/18961Atom probe analysis of a 3D-finfet with high-k metal gateJournal article