CMOS fabricated large array of free standing substrate-less photonic crystal cavities for biosensing applications

Saurav, KumarKumarSauravKumari, SulakshnaSulakshnaKumariLe Thomas, NicolasNicolasLe Thomas2021-10-242021-10-2420171943-0655https://imec-publications.be/handle/20.500.12860/29378CMOS fabricated large array of free standing substrate-less photonic crystal cavities for biosensing applicationsJournal articlehttp://ieeexplore.ieee.org/document/7885076/