Lorusso, GianGianLorussoRutigliani, VitoVitoRutiglianiVan Roey, FriedaFriedaVan RoeyMack, ChrisChrisMack2021-10-252021-10-2520181071-1023https://imec-publications.be/handle/20.500.12860/31240Unbiased roughness measurements: Subtracting out SEM effects, Part 2Journal article