Flip-chip assembly of VCSELs to silicon grating couplers via laser fabricated SU8 prisms

Kaur, KamalpreetKamalpreetKaurSubramanian, AnanthAnanthSubramanianCardile, PaoloPaoloCardileVerplancke, RikRikVerplanckeVan Kerrebrouck, JorisJorisVan KerrebrouckSpiga, S.S.SpigaMeyer, R.R.MeyerBauwelinck, JohanJohanBauwelinckBaets, RoelRoelBaetsVan Steenberge, GeertGeertVan Steenberge2021-10-222021-10-2220151094-4087https://imec-publications.be/handle/20.500.12860/25457Flip-chip assembly of VCSELs to silicon grating couplers via laser fabricated SU8 prismsJournal articlehttps://www.osapublishing.org/oe/abstract.cfm?uri=oe-23-22-28264