Tokei, ZsoltZsoltTokeiVega Gonzalez, VictorVictorVega GonzalezMurdoch, GayleGayleMurdochO'Toole, MartinMartinO'TooleCroes, KristofKristofCroesBaert, RogierRogierBaertvan der Veen, MarleenMarleenvan der VeenAdelmann, ChristophChristophAdelmannSoulie, Jean-PhilippeJean-PhilippeSoulieBoemmels, JuergenJuergenBoemmelsWilson, ChrisChrisWilsonPark, SeonghoSeonghoParkSankaran, KiroubanandKiroubanandSankaranPourtois, GeoffreyGeoffreyPourtoisSwerts, JohanJohanSwertsPaolillo, SaraSaraPaolilloDecoster, StefanStefanDecosterMao, MingMingMaoLazzarino, FredericFredericLazzarinoVersluijs, JankoJankoVersluijsBlanco, VictorVictorBlancoErcken, MoniqueMoniqueErckenKesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeHolsteyns, FrankFrankHolsteynsHeylen, NancyNancyHeylenTeugels, LieveLieveTeugelsDevriendt, KatiaKatiaDevriendtStruyf, HerbertHerbertStruyfMorin, PierrePierreMorinJourdan, NicolasNicolasJourdanVan Elshocht, SvenSvenVan ElshochtCiofi, IvanIvanCiofiGupta, AnshulAnshulGuptaZahedmanesh, HoumanHoumanZahedmaneshVanstreels, KrisKrisVanstreelsNa, Myung HeeMyung HeeNa2021-12-212021-12-062021-12-2120202380-9248WOS:000717011600015https://imec-publications.be/handle/20.500.12860/38547Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneckProceedings paper10.1109/IEDM13553.2020.9371903978-1-7281-8888-1WOS:000717011600015