SPM characterizaton of anomalies in phase shift mask and their effect on wafer features

Muckenhirn, S.S.MuckenhirnMeyyappan, A.A.MeyyappanWalch, K.K.WalchMaslow, M.M.MaslowVandenberghe, GeertGeertVandenberghevan Wingerden, JohannesJohannesvan Wingerden2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5499SPM characterizaton of anomalies in phase shift mask and their effect on wafer featuresProceedings paper