Highly uniform and low-loss passive silicon photonics devices using a 300mm CMOS platform

Selvaraja, ShankarShankarSelvarajaDe Heyn, PeterPeterDe HeynWinroth, GustafGustafWinrothOng, PatrickPatrickOngLepage, GuyGuyLepageCailler, CelineCelineCaillerRigny, ArnaudArnaudRignyBourdelle, KonstantinKonstantinBourdelleBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan ThourhoutVan Campenhout, JorisJorisVan CampenhoutAbsil, PhilippePhilippeAbsil2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24506Highly uniform and low-loss passive silicon photonics devices using a 300mm CMOS platformProceedings paperhttp://www.photonics.intec.ugent.be/publications/publications.asp?ID=3298