Impact of carbon-doping on time dependent dielectric breakdown of SiO2-based films

Zhao, LarryLarryZhaoBarbarin, YohanYohanBarbarinCroes, KristofKristofCroesBaklanov, MikhaïlMikhaïlBaklanovVerdonck, PatrickPatrickVerdonckTokei, ZsoltZsoltTokeiClaeys, CorCorClaeys2021-10-232021-10-2320150003-6951https://imec-publications.be/handle/20.500.12860/26248Impact of carbon-doping on time dependent dielectric breakdown of SiO2-based filmsJournal articlehttp://scitation.aip.org/content/aip/journal/apl/106/7/10.1063/1.4913485