Bender, HugoHugoBenderConard, ThierryThierryConardRichard, OlivierOlivierRichardBrijs, BertBertBrijsPetry, JasmineJasminePetryVandervorst, WilfriedWilfriedVandervorstDefranoux, C.C.DefranouxBoher, P.P.BoherRochat, N.N.RochatWyon, C.C.WyonMack, P.P.MackWolstenholme, J.J.WolstenholmeVitchev, E.E.VitchevHoussiau, L.L.HoussiauPireaux, J-J.J-J.PireauxBergmaier, A.A.BergmaierDollinger, G.G.Dollinger2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8559Physical characterization of mixed HfAlOx layers by complementary analysis techniquesJournal article