Plasma immersion ion implantation for shallow junctions in silicon

Pinter, IstvanIstvanPinterAbdulhadi, A. H.A. H.AbdulhadiMakaro, Z.Z.MakaroKhanh, N. Q.N. Q.KhanhAdam, M.M.AdamBarsony, I.I.BarsonyPoortmans, JefJefPoortmansSivoththaman, SivanarayanamoorthySivanarayanamoorthySivoththamanHai-Zhi, SongSongHai-ZhiAdriaenssens, G.G.Adriaenssens2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3756Plasma immersion ion implantation for shallow junctions in siliconJournal article