Kauerauf, ThomasThomasKaueraufDegraeve, RobinRobinDegraeveZahid, MohammedMohammedZahidCho, Moon JuMoon JuChoKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaesDe Gendt, StefanStefanDe Gendt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10681Abrupt breakdown in dielectric/metal gate stacks: a potential reliability limitation?Journal article