Limits and applications of SIMS in nanoscale technologies

Vandervorst, WilfriedWilfriedVandervorstJanssens, TomTomJanssensGeenen, LucLucGeenenConard, ThierryThierryConardHuyghebaert, CedricCedricHuyghebaertChen, PingPingChen2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11467Limits and applications of SIMS in nanoscale technologiesMeeting abstract