Collart, E.J.E.J.CollartKirkwood, D.D.KirkwoodVandenberg, J.A.J.A.VandenbergWerner, M.M.WernerVandervorst, WilfriedWilfriedVandervorstBrijs, BertBertBrijsBailey, P.P.BaileyNoakes, T.C.Q.T.C.Q.Noakes2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6130Characterization of low energy (2-5keV) implantation into SiOral presentation