In-line Metrology for Vertical Edge Placement Control of Monolithic CFET using CD-SEM

Sun, WeiWeiSunDoi, AyumiAyumiDoiIsawa, MikiMikiIsawaVega Gonzalez, VictorVictorVega GonzalezTokei, ZsoltZsoltTokeiLorusso, GianGianLorusso2024-03-252023-07-282024-03-252023978-1-5106-6099-10277-786XWOS:001022962000054https://imec-publications.be/handle/20.500.12860/42233In-line Metrology for Vertical Edge Placement Control of Monolithic CFET using CD-SEMProceedings paper10.1117/12.2656471978-1-5106-6100-4WOS:001022962000054