A consistent model for the thickness dependence of intrinsic breakdown in ultra-thin oxides

Degraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenBellens, RudiRudiBellensDepas, MichelMichelDepasMaes, HermanHermanMaes2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/615A consistent model for the thickness dependence of intrinsic breakdown in ultra-thin oxidesProceedings paper