Zhou, ChunChunZhouKurosawa, TsuyoshiTsuyoshiKurosawaDazai, TakahiroTakahiroDazaiDoise, JanJanDoiseRen, JiaxingJiaxingRenBezik, CodyCodyBezikSegal-Peretz, TamarTamarSegal-PeretzGronheid, RoelRoelGronheidRincon Delgadillo, PaulinaPaulinaRincon DelgadilloYamazaki,, AkiyoshiAkiyoshiYamazakide Pablo, JuanJuande PabloNealey, PaulPaulNealey2021-10-262021-10-2620181932-5150https://imec-publications.be/handle/20.500.12860/32382Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensionsJournal articlehttps://doi.org/10.1117/1.JMM.17.3.031203