Determination of mechanical and swelling properties of EPOCLAD negative photoresist

Wouters, KristofKristofWoutersVanstreels, KrisKrisVanstreelsGijsenbergh, PieterPieterGijsenberghPuers, BobBobPuers2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18375Determination of mechanical and swelling properties of EPOCLAD negative photoresistProceedings paper