Gronheid, RoelRoelGronheidBekaert, JoostJoostBekaertMKuppuswamy, Vijaya KumarVijaya KumarMKuppuswamyVandenbroeck, NadiaNadiaVandenbroeckDoise, JanJanDoiseCao, YiYiCaoLin, GuanyangGuanyangLinSayan, SafakSafakSayanParnell, DoniDoniParnellSomervell, MarkMarkSomervell2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23884Process optimization of templated DSA flowsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1854367