Surface and interface morphology optimization in MOCVD growth of DH-HEMT structures on 200 mm Si(111) substrates

Zhao, MingMingZhaoKandaswamy, Prem KumarPrem KumarKandaswamyLiang, HuHuLiangSaripalli, YogaYogaSaripalliVaesen, IngeIngeVaesenMoussa, AlainAlainMoussaFavia, PaolaPaolaFaviaRichard, OlivierOlivierRichardBender, HugoHugoBenderDecoutere, StefaanStefaanDecoutereLanger, RobertRobertLanger2021-10-222021-10-222014-08https://imec-publications.be/handle/20.500.12860/24888Surface and interface morphology optimization in MOCVD growth of DH-HEMT structures on 200 mm Si(111) substratesMeeting abstract