Mongillo, MassimoMassimoMongilloPotocnik, AntonAntonPotocnikVerjauw, JeroenJeroenVerjauwMohiyaddin, Fahd AyyalilFahd AyyalilMohiyaddinIvanov, TsvetanTsvetanIvanovAcharya, RohithRohithAcharyaPiao, XiaoyuXiaoyuPiaoPerez Lozano, DanielDanielPerez LozanoWan, DannyDannyWanPacco, AntoineAntoinePaccoJussot, JulienJulienJussotSouriau, LaurentLaurentSouriauAnanthapadmanabha Rao, VadirajVadirajAnanthapadmanabha RaoSwerts, JohanJohanSwertsCouet, SebastienSebastienCouetGoux, LudovicLudovicGouxGovoreanu, BogdanBogdanGovoreanuRadu, IulianaIulianaRadu2022-09-082022-09-0820212380-9248WOS:000812325400149https://imec-publications.be/handle/20.500.12860/40399High-Performance 300mm Integrated Superconducting Resonators for Quantum Computing ApplicationsProceedings paper10.1109/IEDM19574.2021.9720648978-1-6654-2572-8WOS:000812325400149PHOTON