Epitaxial growth of group IV and III-V alloy channel stacks on 300 mm Si substrates for sub-14 nm CMOS generations

Caymax, MattyMattyCaymax2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20424Epitaxial growth of group IV and III-V alloy channel stacks on 300 mm Si substrates for sub-14 nm CMOS generationsOral presentation