Characterization of high-k nanolayers by grazing incidence X-ray spectrometry

Müller, MatthiasMatthiasMüllerHönicke, PhilippPhilippHönickeDetlefs, BlankaBlankaDetlefsFleischmann, ClaudiaClaudiaFleischmann2021-10-222021-10-2220141996-1944https://imec-publications.be/handle/20.500.12860/24285Characterization of high-k nanolayers by grazing incidence X-ray spectrometryJournal articlehttp://www.mdpi.com/1996-1944/7/4/3147