Brijs, BertBertBrijsDe Coster, WalterWalterDe CosterVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/63Sputtering Phenomena of CoSi2 and TiSi2 under Low Energy Oxygen BombardmentOral presentation