Stress-induced mobility enhancement for integrated power transistors

Moens, PaulPaulMoensRoig, J.J.RoigClemente, FrancescaFrancescaClementeDe Wolf, IngridIngridDe WolfDesoete, B.B.DesoeteBauwens, F.F.BauwensTack, M.M.Tack2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12586Stress-induced mobility enhancement for integrated power transistorsProceedings paper