High efficiency SOI fiber-to-waveguide grating couplers fabricated using CMOS technology

Roelkens, GuntherGuntherRoelkensVermeulen, D.D.VermeulenVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaetsBrison, S.S.BrisonLyan, P.P.LyanGautier, P.P.GautierFedeli, J.J.Fedeli2021-10-172021-10-172008-07https://imec-publications.be/handle/20.500.12860/14379High efficiency SOI fiber-to-waveguide grating couplers fabricated using CMOS technologyProceedings paper