Characterization of vertical RESURF diodes using scanning probe microscopy

Duhayon, NatasjaNatasjaDuhayonXu, MingweiMingweiXuVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.HellemansRochefort, ChristelleChristelleRochefortVan Dalen, RobRobVan Dalen2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7539Characterization of vertical RESURF diodes using scanning probe microscopyJournal article