Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealing

Severi, SimoneSimoneSeveriDe Meyer, KristinKristinDe MeyerPawlak, BartekBartekPawlakDuffy, RayRayDuffyKerner, ChristophChristophKernerMcCoy, S.S.McCoyGelpey, J.J.GelpeySelinger, T.T.SelingerRagnarsson, Lars-AkeLars-AkeRagnarssonAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemans2021-10-162021-10-162005-10https://imec-publications.be/handle/20.500.12860/11188Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealingProceedings paper