Schmoeller, ThomasThomasSchmoellerKlimpel, ThomasThomasKlimpelKim, In SungIn SungKimLorusso, GianGianLorussoMyers, AlanAlanMyersJonckheere, RikRikJonckheereGoethals, MiekeMiekeGoethalsRonse, KurtKurtRonse2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14434EUV pattern shift compensation strategiesProceedings paper