Gupta, AnshulAnshulGuptaTao, ZhengZhengTaoRadisic, DunjaDunjaRadisicMertens, HansHansMertensVarela Pedreira, OlallaOlallaVarela PedreiraDemuynck, StevenStevenDemuynckBoemmels, JuergenJuergenBoemmelsDevriendt, KatiaKatiaDevriendtHeylen, NancyNancyHeylenWang, ShouhuaShouhuaWangKenis, KarineKarineKenisTeugels, LieveLieveTeugelsSebaai, FaridFaridSebaaiLorant, ChristopheChristopheLorantJourdan, NicolasNicolasJourdanChan, BTBTChanSubramanian, SujithSujithSubramanianSchleicher, FilipFilipSchleicherPeter, AntonyAntonyPeterRassoul, NouredineNouredineRassoulSiew, Yong KongYong KongSiewBriggs, BasoeneBasoeneBriggsZhou, DaisyDaisyZhouRosseel, ErikErikRosseelCapogreco, ElenaElenaCapogrecoMannaert, GeertGeertMannaertSepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezDupuy, EmmanuelEmmanuelDupuyVandersmissen, KevinKevinVandersmissenChehab, BilalBilalChehabMurdoch, GayleGayleMurdochAltamirano Sanchez, EfrainEfrainAltamirano SanchezBiesemans, SergeSergeBiesemansTokei, ZsoltZsoltTokeiDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchi2023-04-262022-09-082023-04-262022978-1-5106-4987-30277-786XWOS:000844514700010https://imec-publications.be/handle/20.500.12860/40366Buried Power Rail Integration for CMOS Scaling beyond the 3 nm NodeProceedings paper10.1117/12.2615641978-1-5106-4988-0WOS:000844514700010