Schröpfer, GeroldGeroldSchröpferLorenz, GunarGunarLorenzDonnay, StephaneStephaneDonnayRottenberg, XavierXavierRottenbergJansen, RoelofRoelofJansenBienstman, JanJanBienstman2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19748SiGe MEMS process design kit for MEMS-IC designOral presentation