Negative bias temperature instabilities in high-k gate dielectrics

Houssa, MichelMichelHoussaAoulaiche, MarcMarcAoulaicheDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeyns2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15492Negative bias temperature instabilities in high-k gate dielectricsBook chapter