Pantisano, LuigiLuigiPantisanoZahid, MohammedMohammedZahidDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14266Trapping in 1nm EOT high-k dielectricsMeeting abstract