Kumaresan, VishnuvarthanVishnuvarthanKumaresanWilson, ChrisChrisWilsonVerdonck, PatrickPatrickVerdonckVan Besien, ElsElsVan BesienLazzarino, FredericFredericLazzarinoTruffert, VincentVincentTruffertBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokeiWong, T.K.S.T.K.S.Wong2021-10-222021-10-2220140167-9317https://imec-publications.be/handle/20.500.12860/24081Simulation and measurement of the capacitance benefit of air gap interconnects for advanced technology nodesJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931713006928