Brongersma, SywertSywertBrongersmaSherman, S.S.ShermanTabat, M.M.TabatPatz, MichaelMichaelPatzBeyer, GeraldGeraldBeyerTravaly, YoussefYoussefTravalyLe, Quoc ToanQuoc ToanLeCaluwaerts, RudyRudyCaluwaertsHautala, J.J.Hautala2021-10-162021-10-162005-01https://imec-publications.be/handle/20.500.12860/10163Evaluation of gas cluster ion beam processing for sealing af a porous dielectricProceedings paper