Herwik, StanislavStanislavHerwikKisban, SebastianSebastianKisbanAarts, ArnoArnoAartsSeidl, KarstenKarstenSeidlGirardeau, G.G.GirardeauBenchenane, K.K.BenchenaneZugaro, M.B.M.B.ZugaroWiener, S.I.S.I.WienerPereira Neves, HerculesHerculesPereira NevesPaul, OlivierOlivierPaulRuther, PatrickPatrickRuther2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13872Fabrication technology for silicon based microprobe arrays used in acute and subchronic neural recordingProceedings paper